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Submicrometer digital in-line holographic microscopy at 32 nm with high-order harmonics

, : Submicrometer digital in-line holographic microscopy at 32 nm with high-order harmonics. Optics Letters 31(21): 3095-3097

Soft-x-ray digital in-line microscopic holography is achieved using a fully coherent high-order harmonic source emitting at 32 nm. Combination of commercial-grade soft-x-ray optics and a back-illuminated CCD detector allows a compact and versatile holographic setup. Different experimental geometries have been tested by imaging calibrated 50 nm tips and 1 microm wires. Spatial resolution of 800 nm is measured with magnifications ranging from 30 to 110 and a numerical aperture around 0.01. Finally, the potentiality of three-dimensional numerical reconstruction from a single hologram acquisition is shown experimentally.


PMID: 17041646

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